5

Phosphorus gas doping in gas source silicon-MBE

Year:
1990
Language:
english
File:
PDF, 243 KB
english, 1990
13

Gas source silicon molecular beam epitaxy using disilane

Year:
1988
Language:
english
File:
PDF, 442 KB
english, 1988
21

Gas source Si-MBE

Year:
1990
Language:
english
File:
PDF, 516 KB
english, 1990